Gettering of iron in CZ-silicon by polysilicon layer

Research output: Contribution to journalArticleScientificpeer-review

Researchers

Research units

Details

Original languageEnglish
Pages (from-to)751-754
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume8
Issue number3
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

ID: 764530