Gettering of iron in CZ-silicon by polysilicon layer

Antti Haarahiltunen, Marko Yli-Koski, Heli Talvitie, Ville Vähänissi, Jeanette Lindroos, Hele Savin

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)751-754
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume8
Issue number3
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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