Gettering of iron in CZ-silicon by polysilicon layer

Antti Haarahiltunen, Marko Yli-Koski, Heli Talvitie, Ville Vähänissi, Jeanette Lindroos, Hele Savin

Research output: Contribution to journal › Article › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Pages (from-to)	751-754
Journal	Physica Status Solidi (C) Current Topics in Solid State Physics
Volume	8
Issue number	3
DOIs	https://doi.org/10.1002/pssc.201000194
Publication status	Published - 2011
MoE publication type	A1 Journal article-refereed

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title = "Gettering of iron in CZ-silicon by polysilicon layer",

author = "Antti Haarahiltunen and Marko Yli-Koski and Heli Talvitie and Ville V{\"a}h{\"a}nissi and Jeanette Lindroos and Hele Savin",

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T1 - Gettering of iron in CZ-silicon by polysilicon layer

AU - Haarahiltunen, Antti

AU - Yli-Koski, Marko

AU - Talvitie, Heli

AU - Vähänissi, Ville

AU - Lindroos, Jeanette

AU - Savin, Hele

PY - 2011

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UR - http://dx.doi.org/10.1002/pssc.201000194

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DO - 10.1002/pssc.201000194

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VL - 8

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JO - Physica Status Solidi (C) Current Topics in Solid State Physics

JF - Physica Status Solidi (C) Current Topics in Solid State Physics

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