Gettering of Fe by implanted emitters

Hele Savin, Ville Vähänissi, Antti Haarahiltunen

Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

Original languageEnglish
Title of host publicationInternational Conference on Crystalline Silicon Materials and Modules, Breckenridge, Colorado, USA, July 28.-31, 2013
Publication statusPublished - 2013
MoE publication typeD3 Professional conference proceedings

Cite this