Gettering in SOI wafers: experimental studies and modeling

Andrei Istratov, Hele Väinölä, Walter Huber, Eicke Weber

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)568-575
JournalSemiconductor Science and Technology
Volume20
Issue number6
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Keywords

  • copper
  • gettering
  • iron
  • silicon
  • SOI

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