Germanium surface passivation with atomic layer deposited Al2O3

Germanium surface passivation with atomic layer deposited Al₂O₃

^*Corresponding author for this work

Research output: Thesis › Master's thesis

Original language	English
Qualification	Master's degree
Supervisors/Advisors	Savin, Hele, Supervising Professor Pasanen, Toni, Thesis Advisor Vähänissi, Ville, Thesis Advisor
Award date	23 Jan 2020
Publication status	Published - 13 Nov 2019
MoE publication type	G2 Master's thesis, polytechnic Master's thesis