Gentle Patterning Approaches toward Compatibility with Bio-Organic Materials and Their Environmental Aspects

Artem K. Grebenko*, Konstantin A. Motovilov, Anton V. Bubis, Albert G. Nasibulin*

*Corresponding author for this work

Research output: Contribution to journalReview ArticleScientificpeer-review

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Abstract

Advances in material science, bioelectronic, and implantable medicine combined with recent requests for eco-friendly materials and technologies inevitably formulate new challenges for nano- and micropatterning techniques. Overall, the importance of creating micro- and nanostructures is motivated by a large manifold of fundamental and applied properties accessible only at the nanoscale. Lithography is a crucial family of fabrication methods to create prototypes and produce devices on an industrial scale. The pure trend in the miniaturization of critical electronic semiconducting components has been recently enhanced by implementing bio-organic systems in electronics. So far, significant efforts have been made to find novel lithographic approaches and develop old ones to reach compatibility with delicate bio-organic systems and minimize the impact on the environment. Herein, such delicate materials and sophisticated patterning techniques are briefly reviewed.

Original languageEnglish
Article number2200476
Number of pages23
JournalSmall
Volume18
Issue number22
Early online date22 Mar 2022
DOIs
Publication statusPublished - 2 Jun 2022
MoE publication typeA2 Review article in a scientific journal

Keywords

  • biocomaptible substrates
  • eco-friendly materials
  • lithography
  • molecular electronics
  • nanostructures
  • organic semiconductors
  • resists

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