Gas-Phase Deposition of Aminopropylalkoxysilanes on Porous Silica

Satu Ek, Eero Iiskola, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    61 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)3461-3471
    JournalLangmuir
    Volume19
    Issue number8
    Publication statusPublished - 2003
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • aminopropylalkoxysilane
    • aminosilane
    • modification of atomic layer deposition
    • silylation

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