Gas Damping Model for a RF MEMS Switch and Its Dynamic Characteristics

T. Veijola, T. Tinttunen, Heikki Nieminen, V. Ermolov, Tapani Ryhänen

    Research output: Working paperProfessional

    23 Citations (Scopus)
    Original languageEnglish
    Place of PublicationSeattle, USA
    Pages1213-1216
    Publication statusPublished - 2002
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameInternational Microwave Symposium (IMS), Seattle, June2-7, 2002

    Keywords

    • gas damping
    • MEMS
    • switch

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