Gas Damping Model for a RF MEMS Switch and Its Dynamic Characteristics

T. Veijola, T. Tinttunen, Heikki Nieminen, V. Ermolov, Tapani Ryhänen

Research output: Working paper › Professional

24 Citations (Scopus)

Original language	English
Place of Publication	Seattle, USA
Pages	1213-1216
Publication status	Published - 2002
MoE publication type	D4 Published development or research report or study

Name	International Microwave Symposium (IMS), Seattle, June2-7, 2002

Keywords

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title = "Gas Damping Model for a RF MEMS Switch and Its Dynamic Characteristics",

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author = "T. Veijola and T. Tinttunen and Heikki Nieminen and V. Ermolov and Tapani Ryh{\"a}nen",

year = "2002",

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AU - Veijola, T.

AU - Tinttunen, T.

AU - Nieminen, Heikki

AU - Ermolov, V.

AU - Ryhänen, Tapani

PY - 2002

Y1 - 2002

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M3 - Working paper

T3 - International Microwave Symposium (IMS), Seattle, June2-7, 2002

SP - 1213

EP - 1216

BT - Gas Damping Model for a RF MEMS Switch and Its Dynamic Characteristics

CY - Seattle, USA

ER -