Gas Damping in Vibrating MEMS Structures

Timo Veijola

    Research output: Chapter in Book/Report/Conference proceedingChapterProfessional

    Original languageEnglish
    Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
    EditorsVeikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
    Place of PublicationAmsterdam
    PublisherElsevier
    Pages259-279
    ISBN (Print)978-0-8155-1594-4
    Publication statusPublished - 2010
    MoE publication typeD2 Article in professional manuals or guides or professional information systems or text book material

    Keywords

    • gas damping
    • MEMS
    • modelling of MEMS
    • squeeze-film damping

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