Gas Damping Effect on Thin Vibrating Gold Plates: Experiments and Modeling

Giorgio De Pasquale, Timo Veijola, Aurelio Somà

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

11 Citations (Scopus)

Original language	English
Title of host publication	Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009
Place of Publication	Rome, Italy
Pages	23-28
Publication status	Published - 2009
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{8f8ebdf8434e4285bdfe41e0f0bd42d9,

title = "Gas Damping Effect on Thin Vibrating Gold Plates: Experiments and Modeling",

keywords = "experiments, gas damping, gold plate, MEMS, experiments, gas damping, gold plate, MEMS, experiments, gas damping, gold plate, MEMS",

author = "{De Pasquale}, Giorgio and Timo Veijola and Aurelio Som{\`a}",

year = "2009",

language = "English",

isbn = "978-2-35500-009-6",

pages = "23--28",

booktitle = "Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009",

}

TY - GEN

T1 - Gas Damping Effect on Thin Vibrating Gold Plates: Experiments and Modeling

AU - De Pasquale, Giorgio

AU - Veijola, Timo

AU - Somà, Aurelio

PY - 2009

Y1 - 2009

KW - experiments

KW - gas damping

KW - gold plate

KW - MEMS

KW - experiments

KW - gas damping

KW - gold plate

KW - MEMS

KW - experiments

KW - gas damping

KW - gold plate

KW - MEMS

M3 - Conference contribution

SN - 978-2-35500-009-6

SP - 23

EP - 28

BT - Design, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009

CY - Rome, Italy

ER -