Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Pages (from-to)245304-1-245304-9
JournalJournal of Applied Physics
Volume117
Issue number24
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

Researchers

Research units

Download statistics

No data available

ID: 1994890