Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

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Original languageEnglish
Pages (from-to)245304-1-245304-9
JournalJournal of Applied Physics
Volume117
Issue number24
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

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ID: 1994890