Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

Mikael Broas
, Xuwen Liu
, Yanling Ge
, Toni Tuomas Mattila
, Mervi Paulasto-Kröckel

Research output: Contribution to journal › Article › Scientific › peer-review

277 Downloads (Pure)

2 results
- Title(descending)

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility