Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

Mikael Broas; Xuwen Liu; Yanling Ge; Toni Tuomas Mattila; Mervi Paulasto-Kröckel

doi:10.1063/1.4923025

Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

Mikael Broas, Xuwen Liu, Yanling Ge, Toni Tuomas Mattila, Mervi Paulasto-Kröckel

Research output: Contribution to journal › Article › Scientific › peer-review

269 Downloads (Pure)

Original language	English
Pages (from-to)	245304-1-245304-9
Journal	Journal of Applied Physics
Volume	117
Issue number	24
DOIs	https://doi.org/10.1063/1.4923025
Publication status	Published - 2015
MoE publication type	A1 Journal article-refereed

Access to Document

10.1063/1.4923025

1.4923025Final published version, 2.99 MB

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@article{3564e80512bb41a4b320c6aa52b5636e,

title = "Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices",

author = "Mikael Broas and Xuwen Liu and Yanling Ge and Mattila, {Toni Tuomas} and Mervi Paulasto-Kr{\"o}ckel",

year = "2015",

doi = "10.1063/1.4923025",

language = "English",

volume = "117",

pages = "245304--1--245304--9",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "24",

}

TY - JOUR

T1 - Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

AU - Broas, Mikael

AU - Liu, Xuwen

AU - Ge, Yanling

AU - Mattila, Toni Tuomas

AU - Paulasto-Kröckel, Mervi

PY - 2015

Y1 - 2015

U2 - 10.1063/1.4923025

DO - 10.1063/1.4923025

M3 - Article

SN - 0021-8979

VL - 117

SP - 245304-1-245304-9

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 24

ER -

Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

Access to Document

Equipment

OtaNano

Raw Materials Research Infrastructure

Cite this