Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific


Research units


Original languageEnglish
Title of host publicationElectronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015
Publication statusPublished - 2015
MoE publication typeB3 Non-refereed article in conference proceedings

ID: 1477404