Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone

Mikael Broas, Jue Li, Xuwen Liu, Yanling Ge, Antti Peltonen, Toni Tuomas Mattila, Mervi Paulasto-Krockel

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

4 Citations (Scopus)

Original language	English
Title of host publication	Electronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015
Publisher	IEEE
Pages	453-459
ISBN (Print)	9781479986088
Publication status	Published - 2015
MoE publication type	B3 Non-refereed conference publication

Cite this

@inproceedings{efe4202afc3b42038c965b54ad4312f3,

title = "Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone",

author = "Mikael Broas and Jue Li and Xuwen Liu and Yanling Ge and Antti Peltonen and Mattila, {Toni Tuomas} and Mervi Paulasto-Krockel",

year = "2015",

language = "English",

isbn = "9781479986088",

pages = "453--459",

booktitle = "Electronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015",

publisher = "IEEE",

address = "United States",

}

TY - GEN

T1 - Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone

AU - Broas, Mikael

AU - Li, Jue

AU - Liu, Xuwen

AU - Ge, Yanling

AU - Peltonen, Antti

AU - Mattila, Toni Tuomas

AU - Paulasto-Krockel, Mervi

PY - 2015

Y1 - 2015

M3 - Conference article in proceedings

SN - 9781479986088

SP - 453

EP - 459

BT - Electronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015

PB - IEEE

ER -