Gallium nitride thin film bulk acoustic resonators for microwave frequencies

Mikael Kervinen

Research output: Thesis › Master's thesis

Original language	English
Publisher	Aalto University School of Science
Publication status	Published - 14 Jun 2016
MoE publication type	G2 Master's thesis, polytechnic Master's thesis

Keywords

@phdthesis{ff068ce2030242cdb6c53997d7b57afc,

title = "Gallium nitride thin film bulk acoustic resonators for microwave frequencies",

keywords = "gallium nitride, thin film, resonator, FBAR, Q-factor",

author = "Mikael Kervinen",

year = "2016",

month = jun,

day = "14",

language = "English",

publisher = "Aalto University School of Science",

address = "Finland",

}