Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems

Outi Reentilä, Marco Mattila, Juha Toivonen, Teppo Hakkarainen, Markku Sopanen, Harri Lipsanen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • GaAsN
    • GaInNAs
    • growth pressure
    • MOVPE

    Cite this

    Reentilä, O., Mattila, M., Toivonen, J., Hakkarainen, T., Sopanen, M., & Lipsanen, H. (2004). Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems. In 2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA