@inproceedings{6565d89abbfe4315a863607c5cb2cc46,
title = "Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems",
keywords = "GaAsN, GaInNAs, growth pressure, MOVPE, GaAsN, GaInNAs, growth pressure, MOVPE, GaAsN, GaInNAs, growth pressure, MOVPE",
author = "Outi Reentil{\"a} and Marco Mattila and Juha Toivonen and Teppo Hakkarainen and Markku Sopanen and Harri Lipsanen",
year = "2004",
language = "English",
booktitle = "2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA",
}