Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems

Outi Reentilä, Marco Mattila, Juha Toivonen, Teppo Hakkarainen, Markku Sopanen, Harri Lipsanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA
Publication status	Published - 2004
MoE publication type	A4 Conference publication

Keywords

@inproceedings{6565d89abbfe4315a863607c5cb2cc46,

title = "Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems",

keywords = "GaAsN, GaInNAs, growth pressure, MOVPE, GaAsN, GaInNAs, growth pressure, MOVPE, GaAsN, GaInNAs, growth pressure, MOVPE",

author = "Outi Reentil{\"a} and Marco Mattila and Juha Toivonen and Teppo Hakkarainen and Markku Sopanen and Harri Lipsanen",

year = "2004",

language = "English",

booktitle = "2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA",

}

Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems. / Reentilä, Outi; Mattila, Marco; Toivonen, Juha et al.
2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA. 2004.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Ga(In)NAs growth parameter optimization with low-pressure and atmospheric-pressure MOVPE systems

AU - Reentilä, Outi

AU - Mattila, Marco

AU - Toivonen, Juha

AU - Hakkarainen, Teppo

AU - Sopanen, Markku

AU - Lipsanen, Harri

PY - 2004

Y1 - 2004

KW - GaAsN

KW - GaInNAs

KW - growth pressure

KW - MOVPE

KW - GaAsN

KW - GaInNAs

KW - growth pressure

KW - MOVPE

KW - GaAsN

KW - GaInNAs

KW - growth pressure

KW - MOVPE

M3 - Conference article in proceedings

BT - 2nd International Workshop on Metastable Combound Semiconductors and Heterostructures, 31.3-3.3.2004, Hawaii, USA

ER -