Gadolinium oxide thin films by atomic layer deposition

Jaakko Niinistö, Nikolina Petrova, Matti Putkonen, Lauri Niinistö, Kai Arstila, Timo Sajavaara

    Research output: Contribution to journalArticleScientificpeer-review

    69 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)191-200
    JournalJournal of Crystal Growth
    Volume285
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • atomic layer deposition
    • cyclopentadienyl precursors
    • Gd2O3
    • high-k dielectrics
    • rare earth oxides

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