@article{e0a4abf0b2d146bf97217e661f494021,
title = "Gadolinium oxide thin films by atomic layer deposition",
keywords = "ALD, atomic layer deposition, cyclopentadienyl precursors, Gd2O3, high-k dielectrics, rare earth oxides, ALD, atomic layer deposition, cyclopentadienyl precursors, Gd2O3, high-k dielectrics, rare earth oxides, ALD, atomic layer deposition, cyclopentadienyl precursors, Gd2O3, high-k dielectrics, rare earth oxides",
author = "Jaakko Niinist{\"o} and Nikolina Petrova and Matti Putkonen and Lauri Niinist{\"o} and Kai Arstila and Timo Sajavaara",
year = "2005",
language = "English",
volume = "285",
pages = "191--200",
journal = "Journal of Crystal Growth",
issn = "1873-5002",
publisher = "Elsevier",
}