GaAs and AlGaAs Reactive Ion Etching for High-Speed HEMT IC

V. Stepanov, E. Siren, A. Heinämäki

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication15th Nordic Semiconductor Meeting, Hämeenlinna, June 8-11,1992
Pages357-360
Publication statusPublished - 1992
MoE publication typeA4 Article in a conference publication

Keywords

  • AlGaAs
  • GaAs
  • HEMT
  • RIE

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