Future challenges of atomic-layer-deposition technology: New-material synthesis and surface-engineering

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationNanotechnology Cluster Meeting, Osaka, Japan, Feb. 20, 2008
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication

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