Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors

M. Saukoski, L. Aaltonen, T. Salo, K. Halonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    38 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the IEEE International Symposium on Circuits and Systems ISACS'05, May 23 - May 26, 2005, Kobe, Japan
    Pages5377
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication

    Keywords

    • charge sensitive amplifier
    • CMOS
    • MEMS

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