Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors

M. Saukoski, T. Salo, K. Halonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    38 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia
    Pages91
    Publication statusPublished - 2004
    MoE publication typeA4 Article in a conference publication

    Keywords

    • charge-sensitive amplifier
    • CMOS
    • MEMS

    Cite this

    Saukoski, M., Salo, T., & Halonen, K. (2004). Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors. In Proceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia (pp. 91)