Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors

M. Saukoski, T. Salo, K. Halonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

42 Citations (Scopus)

Original language	English
Title of host publication	Proceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia
Pages	91
Publication status	Published - 2004
MoE publication type	A4 Conference publication

Keywords

@inproceedings{b90bf4578eb047d481a04913550a0194,

title = "Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors",

keywords = "charge-sensitive amplifier, CMOS, MEMS, charge-sensitive amplifier, CMOS, MEMS, charge-sensitive amplifier, CMOS, MEMS",

author = "M. Saukoski and T. Salo and K. Halonen",

year = "2004",

language = "English",

pages = "91",

booktitle = "Proceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia",

}

Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors. / Saukoski, M.; Salo, T.; Halonen, K.
Proceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia. 2004. p. 91.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Fully Integrated Charge Sensitive Amplifier for Readout of Micromechanical Capacitive Sensors

AU - Saukoski, M.

AU - Salo, T.

AU - Halonen, K.

PY - 2004

Y1 - 2004

KW - charge-sensitive amplifier

KW - CMOS

KW - MEMS

KW - charge-sensitive amplifier

KW - CMOS

KW - MEMS

KW - charge-sensitive amplifier

KW - CMOS

KW - MEMS

M3 - Conference article in proceedings

SP - 91

BT - Proceedings of the Baltic Electronics Conference BEC'04, October 3 - October 6, 2004, Tallinn, Estonia

ER -