From R&D Towards Industrial Atomic Layer Deposition in MEMS Applications

M Bosund, Matti Putkonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationIMAPS Nordic annual conference 2011, Dipoli Congress Center, Espoo, Finland, June 5-8, 2011
    Publication statusPublished - 2011
    MoE publication typeA4 Article in a conference publication

    Cite this

    Bosund, M., & Putkonen, M. (2011). From R&D Towards Industrial Atomic Layer Deposition in MEMS Applications. In IMAPS Nordic annual conference 2011, Dipoli Congress Center, Espoo, Finland, June 5-8, 2011