Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

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Original languageEnglish
Pages (from-to)408-415
JournalSensors and Actuators A
Volume120
Issue number2
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

    Research areas

  • adhesive bonding, microchannel, microfluidic, SU-8, wafer bonding

ID: 3458292