Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Santeri Tuomikoski, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

101 Citations (Scopus)
Original languageEnglish
Pages (from-to)408-415
JournalSensors and Actuators A
Volume120
Issue number2
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed

Keywords

  • adhesive bonding
  • microchannel
  • microfluidic
  • SU-8
  • wafer bonding

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