Free-standing Si/SiO2 superlattices: fabrication procedure and optical, structural, and light-emitting properties

Sergey Novikov, Juha Sinkkonen, Leonid Khriachtchev, Markku Räsänen, Alla Sitnikova

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	619512
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6195
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

Cite this

@article{bc1efdf937b94ae4836b3c077283fd12,

title = "Free-standing Si/SiO2 superlattices: fabrication procedure and optical, structural, and light-emitting properties",

author = "Sergey Novikov and Juha Sinkkonen and Leonid Khriachtchev and Markku R{\"a}s{\"a}nen and Alla Sitnikova",

year = "2006",

language = "English",

volume = "6195",

pages = "619512",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Free-standing Si/SiO2 superlattices: fabrication procedure and optical, structural, and light-emitting properties

AU - Novikov, Sergey

AU - Sinkkonen, Juha

AU - Khriachtchev, Leonid

AU - Räsänen, Markku

AU - Sitnikova, Alla

PY - 2006

Y1 - 2006

M3 - Article

SN - 0277-786X

VL - 6195

SP - 619512

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -