Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova; Oili M. E. Ylivaara; Ville Rontu; Pekka T. Törmä; Riikka Puurunen; Sami Franssila

doi:10.1116/1.4893769

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka Puurunen, Sami Franssila

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)

638 Downloads (Pure)

Original language	English
Number of pages	5
Journal	Journal of Vacuum Science and Technology A
Volume	33
Issue number	1
DOIs	https://doi.org/10.1116/1.4893769
Publication status	Published - 2015
MoE publication type	A1 Journal article-refereed

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Berdova-Ylivaara-et al-10-1116-1-4893769Final published version, 944 KB

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@article{30d1a13b66a34f6dbb21aa8c33a9ded9,

title = "Fracture properties of atomic layer deposited aluminum oxide free-standing membranes",

author = "Maria Berdova and Ylivaara, \{Oili M. E.\} and Ville Rontu and T{\"o}rm{\"a}, \{Pekka T.\} and Riikka Puurunen and Sami Franssila",

year = "2015",

doi = "10.1116/1.4893769",

language = "English",

volume = "33",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "1",

}

TY - JOUR

T1 - Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

AU - Berdova, Maria

AU - Ylivaara, Oili M. E.

AU - Rontu, Ville

AU - Törmä, Pekka T.

AU - Puurunen, Riikka

AU - Franssila, Sami

PY - 2015

Y1 - 2015

UR - https://www.scopus.com/pages/publications/84906660626

U2 - 10.1116/1.4893769

DO - 10.1116/1.4893769

M3 - Article

SN - 0734-2101

VL - 33

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 1

ER -

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

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