Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
329 Downloads (Pure)
Original languageEnglish
Number of pages5
JournalJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A
Volume33
Issue number1
DOIs
Publication statusPublished - 2015
MoE publication typeA1 Journal article-refereed

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OtaNano

Anna Rissanen (Manager)

Aalto University

Facility/equipment: Facility

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