Formation of Ohmic Contacts to n-GaAS using (NH(4))2S Surface Passivation

V. Fischer, P.H. Holloway, E.O. Ristolainen, D. Schoenfeld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication39th AVS National Symposium, 9-13 Nov.
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication

    Keywords

    • GaAS alloy
    • ohmic contact
    • surface passivation

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