Formation of Gaseous Intermediates in Titanium(IV) Chloride Plasma Oxidation

B. Karlemo, P. Koukkari, J. Paloniemi

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)59-77
    JournalPlasma Chemistry and Plasma Processing
    Issue number1
    Publication statusPublished - 1996
    MoE publication typeA1 Journal article-refereed


    • chain reaction mechanism
    • chemical synthesis
    • oxidation of titanium(IV) chloride
    • RF plasma

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