Formation of excess donors during (74)Ge(+) ion implantation

Z. Xia, Eränen Ristolainen, H. Ronkainen, J. Suni, R. Elliman, M. Sopanen, P. Holloway

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Electronic Materials Conference, Nov 28- Dec 2, 1994, Boston
Publisher	MRS Fall Meeting
Publication status	Published - 1994
MoE publication type	A4 Article in a conference publication

Keywords

@inproceedings{a121eef7b1b54342be2996f27bc90291,

title = "Formation of excess donors during (74)Ge(+) ion implantation",

keywords = "excess donor, Ge ion implantation, SIMS, excess donor, Ge ion implantation, SIMS, excess donor, Ge ion implantation, SIMS",

author = "Z. Xia and Er{\"a}nen Ristolainen and H. Ronkainen and J. Suni and R. Elliman and M. Sopanen and P. Holloway",

year = "1994",

language = "English",

booktitle = "Electronic Materials Conference, Nov 28- Dec 2, 1994, Boston",

publisher = "MRS Fall Meeting",

}

TY - GEN

T1 - Formation of excess donors during (74)Ge(+) ion implantation

AU - Xia, Z.

AU - Ristolainen, Eränen

AU - Ronkainen, H.

AU - Suni, J.

AU - Elliman, R.

AU - Sopanen, M.

AU - Holloway, P.

PY - 1994

Y1 - 1994

KW - excess donor

KW - Ge ion implantation

KW - SIMS

KW - excess donor

KW - Ge ion implantation

KW - SIMS

KW - excess donor

KW - Ge ion implantation

KW - SIMS

M3 - Conference contribution

BT - Electronic Materials Conference, Nov 28- Dec 2, 1994, Boston

PB - MRS Fall Meeting

ER -