Formation of excess donors during (74)Ge(+) ion implantation

Z. Xia, Eränen Ristolainen, H. Ronkainen, J. Suni, R. Elliman, M. Sopanen, P. Holloway

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationElectronic Materials Conference, Nov 28- Dec 2, 1994, Boston
    PublisherMRS Fall Meeting
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication

    Keywords

    • excess donor
    • Ge ion implantation
    • SIMS

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