@inproceedings{a121eef7b1b54342be2996f27bc90291,
title = "Formation of excess donors during (74)Ge(+) ion implantation",
keywords = "excess donor, Ge ion implantation, SIMS, excess donor, Ge ion implantation, SIMS, excess donor, Ge ion implantation, SIMS",
author = "Z. Xia and Er{\"a}nen Ristolainen and H. Ronkainen and J. Suni and R. Elliman and M. Sopanen and P. Holloway",
year = "1994",
language = "English",
booktitle = "Electronic Materials Conference, Nov 28- Dec 2, 1994, Boston",
publisher = "MRS Fall Meeting",
}