Formation and stability of lanthanum oxide thin films deposited from beta-diketonate precursor

Minna Nieminen, Matti Putkonen, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)155-165
    JournalApplied Surface Science
    Volume174
    Issue number2
    Publication statusPublished - 2001
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALE deposition
    • beta-diketonate
    • lanthanum oxide
    • thin film

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