Focused ion beam high resolution grayscale lithography for silicon-based nanostructures

Mikhail Erdmanis, Ilkka Tittonen

Research output: Contribution to journalArticle

13 Citations (Scopus)
144 Downloads (Pure)
Original languageEnglish
Pages (from-to)1-5
JournalApplied Physics Letters
Volume104
Issue number073118
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

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