Flow pattern defects in Czochralski-grown silicon crystals

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Keywords

@article{57ff47c2de934be2bda5dcac2c330302,

title = "Flow pattern defects in Czochralski-grown silicon crystals",

keywords = "Czochralski-grown, silicon crystals, Czochralski-grown, silicon crystals, Czochralski-grown, silicon crystals",

author = "Reko Rantam{\"a}ki and J. Molarius and M. Tilli and T. Tuomi",

year = "1997",

language = "English",

volume = "T69",

pages = "264--267",

journal = "Physica Scripta",

issn = "1402-4896",

publisher = "Institute of Physics Publishing",

}

TY - JOUR

T1 - Flow pattern defects in Czochralski-grown silicon crystals

AU - Rantamäki, Reko

AU - Molarius, J.

AU - Tilli, M.

AU - Tuomi, T.

PY - 1997

Y1 - 1997

KW - Czochralski-grown

KW - silicon crystals

KW - Czochralski-grown

KW - silicon crystals

KW - Czochralski-grown

KW - silicon crystals

M3 - Article

SN - 1402-4896

VL - T69

SP - 264

EP - 267

JO - Physica Scripta

JF - Physica Scripta

ER -