Flow pattern defects in Czochralski-grown silicon crystals

Reko Rantamäki, J. Molarius, M. Tilli, T. Tuomi

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)264-267
    JournalPhysica Scripta
    VolumeT69
    Publication statusPublished - 1997
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Czochralski-grown
    • silicon crystals

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