Two-dimensional (2D) materials and novel nanostructures open up enormous opportunities for research and industry. The advantages of nanosized materials and structures over bulk are obviously in their small dimensions, but also in physical phenomena predicted to exceed limits of current semiconductor materials. Among them are high carrier mobility at room temperature, intrinsic transmittance and flexibility, possibility to have a smaller channel and large surface-to-volume ratio. The properties of these materials and structures hold promise for next-generation electronics and optoelectronics. This thesis focuses on fabrication methods suitable for transferring laboratory research in nanomaterials and nanostructures, such as graphene and nanowires (NWs) to industrial production. Particularly, parylene C is considered as a multifunctional platform for combined use as substrate, dielectric and encapsulation layer, which provides potential scalability for devices based on novel materials. The whole thesis can be divided in three main parts. The first part introduces studied nanomaterials and nanostructures, their properties, synthesis methods for nanowires and parylene, and gives brief outlook on potential of materials. The second part includes the background on graphene synthesis by chemical vapor deposition (CVD), characterization and fabrication methods for graphene, NWs and parylene. The third part presents results achieved by utilizing parylene as substrate and dielectric for graphene and as encapsulation layer for NWs. Moreover, possible future applications of graphene/parylene films are discussed. Finally, the whole content is summarized and personal outlook on the study given.
|Translated title of the contribution||Flexible platform for next-generation electronics|
|Publication status||Published - 2021|
|MoE publication type||G5 Doctoral dissertation (article)|
- flexible electronics
- thin film transistor
- flexible gate dielectric
- two-dimensional materials
- parylene C
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Anna Rissanen (Manager)Aalto University
OtaNano - Nanofab
Päivikki Repo (Manager)OtaNano