Flat-top profile of an excimer-laser beam generated using beam-splitter gratings

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Timo Kajava
  • Antti Hakola
  • Henna Elfström
  • Janne Simonen
  • Pertti Pääkkönen
  • Jari Turunen

Research units

Details

Original languageEnglish
Pages (from-to)289-293
JournalOptics Communications
Volume268
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

    Research areas

  • diffractive optics, excimer laser, flat-top beam, pulsed laser deposition

ID: 3588223