@article{73c4990b9497402cb54ded1d043e28f1,
title = "Flat-top profile of an excimer-laser beam generated using beam-splitter gratings",
keywords = "diffractive optics, excimer laser, flat-top beam, pulsed laser deposition, diffractive optics, excimer laser, flat-top beam, pulsed laser deposition, diffractive optics, excimer laser, flat-top beam, pulsed laser deposition",
author = "Timo Kajava and Antti Hakola and Henna Elfstr{\"o}m and Janne Simonen and Pertti P{\"a}{\"a}kk{\"o}nen and Jari Turunen",
year = "2006",
language = "English",
volume = "268",
pages = "289--293",
journal = "Optics Communications",
issn = "1873-0310",
publisher = "Elsevier",
}