Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density

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Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density. / Tiilikainen, Jouni; Bosund, Vesa; Mattila, Marco; Hakkarainen, Teppo; Sormunen, Jaakko; Lipsanen, Harri.

In: Journal of Physics D: Applied Physics, Vol. 40, No. 14, 2007, p. 4259-4263.

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Tiilikainen, Jouni ; Bosund, Vesa ; Mattila, Marco ; Hakkarainen, Teppo ; Sormunen, Jaakko ; Lipsanen, Harri. / Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density. In: Journal of Physics D: Applied Physics. 2007 ; Vol. 40, No. 14. pp. 4259-4263.

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@article{cd30a7c016b24691bb2162e504d8aa48,
title = "Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density",
keywords = "atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity, atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity, atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity",
author = "Jouni Tiilikainen and Vesa Bosund and Marco Mattila and Teppo Hakkarainen and Jaakko Sormunen and Harri Lipsanen",
year = "2007",
doi = "10.1088/0022-3727/40/14/023",
language = "English",
volume = "40",
pages = "4259--4263",
journal = "Journal of Physics D - Applied Physics",
issn = "0022-3727",
number = "14",

}

RIS - Download

TY - JOUR

T1 - Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density

AU - Tiilikainen, Jouni

AU - Bosund, Vesa

AU - Mattila, Marco

AU - Hakkarainen, Teppo

AU - Sormunen, Jaakko

AU - Lipsanen, Harri

PY - 2007

Y1 - 2007

KW - atomic layer deposition

KW - crowwerror

KW - fitness landscape

KW - x-ray reflectivity

KW - atomic layer deposition

KW - crowwerror

KW - fitness landscape

KW - x-ray reflectivity

KW - atomic layer deposition

KW - crowwerror

KW - fitness landscape

KW - x-ray reflectivity

UR - http://dx.doi.org/doi:10.1088/0022-3727/40/14/023

U2 - 10.1088/0022-3727/40/14/023

DO - 10.1088/0022-3727/40/14/023

M3 - Article

VL - 40

SP - 4259

EP - 4263

JO - Journal of Physics D - Applied Physics

JF - Journal of Physics D - Applied Physics

SN - 0022-3727

IS - 14

ER -

ID: 3548900