Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Jouni Tiilikainen
  • Vesa Bosund
  • Marco Mattila
  • Teppo Hakkarainen
  • Jaakko Sormunen
  • Harri Lipsanen

Research units

Details

Original languageEnglish
Pages (from-to)4259-4263
Number of pages5
JournalJournal of Physics D: Applied Physics
Volume40
Issue number14
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

    Research areas

  • atomic layer deposition, crowwerror, fitness landscape, x-ray reflectivity

ID: 3548900