Fitness function and nonunique solutions in x-ray reflectivity curve fitting: crosserror between surface roughness and mass density

Jouni Tiilikainen, Vesa Bosund, Marco Mattila, Teppo Hakkarainen, Jaakko Sormunen, Harri Lipsanen

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)4259-4263
    Number of pages5
    JournalJournal of Physics D: Applied Physics
    Issue number14
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed


    • atomic layer deposition
    • crowwerror
    • fitness landscape
    • x-ray reflectivity

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