Finite element simulations of thin-film composite BAW resonators

Tapani Makkonen, Antti Holappa, Juha Ellä, Martti M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)1241-1258
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume48
Issue number5
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

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