Filling of Slot Waveguides with Versatile Material Systems Using Atomic Layer Deposition

Tapani Alasaarela, Antti Säynätjoki, Petri Stenberg, Markku Kuittinen, Seppo Honkanen

    Research output: Working paperProfessional

    1 Citation (Scopus)
    Original languageEnglish
    PagesPaper JTuB4
    Publication statusPublished - 2009
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameIntegrated Photonics and Nanophotonics Research and Applications (IPNRA), Honolulu, Hawaii, USA, July 12-17, 2009
    PublisherOptical Society of America

    Keywords

    • atomic layer deposition
    • integrated optics devices
    • waveguides

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