Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain

Lu Xu; Donnacha Lowney; Patrick J. McNally; A. Borowiec; Aapo Lankinen; Turkka O. Tuomi; A.N. Danilewsky

Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain

Lu Xu, Donnacha Lowney, Patrick J. McNally, A. Borowiec, Aapo Lankinen, Turkka O. Tuomi, A.N. Danilewsky

Research output: Contribution to journal › Article › Scientific › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	970-979
Journal	Semiconductor Science and Technology
Volume	22
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

InP
micromachining
synchrotron topography

Access to Document

http://www.iop.org/EJ/abstract/0268-1242/22/8/024

Cite this

@article{51b242d606394112ace2b75a3c20cd83,

title = "Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain",

keywords = "InP, micromachining, synchrotron topography, InP, micromachining, synchrotron topography, InP, micromachining, synchrotron topography",

author = "Lu Xu and Donnacha Lowney and McNally, {Patrick J.} and A. Borowiec and Aapo Lankinen and Tuomi, {Turkka O.} and A.N. Danilewsky",

year = "2007",

language = "English",

volume = "22",

pages = "970--979",

journal = "Semiconductor Science and Technology",

issn = "0268-1242",

publisher = "IOP Publishing Ltd.",

}

Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain. / Xu, Lu; Lowney, Donnacha; McNally, Patrick J.; Borowiec, A.; Lankinen, Aapo; Tuomi, Turkka O.; Danilewsky, A.N.

In: Semiconductor Science and Technology, Vol. 22, 2007, p. 970-979.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain

AU - Xu, Lu

AU - Lowney, Donnacha

AU - McNally, Patrick J.

AU - Borowiec, A.

AU - Lankinen, Aapo

AU - Tuomi, Turkka O.

AU - Danilewsky, A.N.

PY - 2007

Y1 - 2007

KW - InP

KW - micromachining

KW - synchrotron topography

KW - InP

KW - micromachining

KW - synchrotron topography

KW - InP

KW - micromachining

KW - synchrotron topography

UR - http://www.iop.org/EJ/abstract/0268-1242/22/8/024

M3 - Article

VL - 22

SP - 970

EP - 979

JO - Semiconductor Science and Technology

JF - Semiconductor Science and Technology

SN - 0268-1242

ER -