Femtosecond versus nanosecond laser micro-machining of InP: a nondestructive three-dimensional analysis of strain

Lu Xu, Donnacha Lowney, Patrick J. McNally, A. Borowiec, Aapo Lankinen, Turkka O. Tuomi, A.N. Danilewsky

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)970-979
    JournalSemiconductor Science and Technology
    Volume22
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • InP
    • micromachining
    • synchrotron topography

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