FEM-Modeling of gas-structure interaction in MEMS.Dissertation for the degree of Licentiate in Technology

Virpi Junttila

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Publication statusPublished - 2003
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameTechnical Report
    PublisherHelsinki University of Technology, Laboratory of Computational Engineering
    No.B36

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