Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition

Research output: Contribution to journalArticleScientificpeer-review


  • Tapani Alasaarela
  • Antti Säynätjoki
  • Teppo Hakkarainen
  • Seppo Honkanen

Research units


Original languageEnglish
Pages (from-to)080502-1
JournalOptical engineering
Issue number8
Publication statusPublished - 2009
MoE publication typeA1 Journal article-refereed

    Research areas

  • atomic layer deposition, integrated optics, nanowaveguides, silicon photonics, silicon-on-insulator, thin films

ID: 3496066