Feature size reduction of silicon slot waveguides by partial filling using atomic layer deposition

Tapani Alasaarela, Antti Säynätjoki, Teppo Hakkarainen, Seppo Honkanen

    Research output: Contribution to journalArticleScientificpeer-review

    20 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)080502-1
    JournalOptical engineering
    Issue number8
    Publication statusPublished - 2009
    MoE publication typeA1 Journal article-refereed


    • atomic layer deposition
    • integrated optics
    • nanowaveguides
    • silicon photonics
    • silicon-on-insulator
    • thin films

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