Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics

Jorge Velasco Calsina; Christine Gonsalves; Gizem Ersavas Isitman; Jihong Yim; Emma Verkama; Daulet Izbassarov; Ville Vuorinen; Riikka Puurunen

Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics

Jorge Velasco Calsina, Christine Gonsalves, Gizem Ersavas Isitman, Jihong Yim, Emma Verkama, Daulet Izbassarov, Ville Vuorinen, Riikka Puurunen

Research output: Contribution to conference › Poster › Scientific

Original language	English
Publication status	Published - 2022
MoE publication type	Not Eligible
Event	International Conference on Atomic Layer Deposition - International Convention Center (ICC), Ghent, Belgium Duration: 26 Jun 2022 → 29 Jun 2022 Conference number: 22

Conference

Conference	International Conference on Atomic Layer Deposition
Abbreviated title	ALD
Country/Territory	Belgium
City	Ghent
Period	26/06/2022 → 29/06/2022

Cite this

Velasco Calsina, J., Gonsalves, C., Ersavas Isitman, G., Yim, J., Verkama, E., Izbassarov, D., Vuorinen, V., & Puurunen, R. (2022). Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics. Poster session presented at International Conference on Atomic Layer Deposition, Ghent, Belgium.

@conference{409fb6eeeb824de4a5812f1704c21a55,

title = "Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics",

author = "{Velasco Calsina}, Jorge and Christine Gonsalves and {Ersavas Isitman}, Gizem and Jihong Yim and Emma Verkama and Daulet Izbassarov and Ville Vuorinen and Riikka Puurunen",

year = "2022",

language = "English",

note = "International Conference on Atomic Layer Deposition, ALD ; Conference date: 26-06-2022 Through 29-06-2022",

}

Velasco Calsina, J , Gonsalves, C , Ersavas Isitman, G , Yim, J, Verkama, E, Izbassarov, D, Vuorinen, V & Puurunen, R 2022, 'Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics', International Conference on Atomic Layer Deposition, Ghent, Belgium, 26/06/2022 - 29/06/2022.

Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics. / Velasco Calsina, Jorge ; Gonsalves, Christine ; Ersavas Isitman, Gizem et al.
2022. Poster session presented at International Conference on Atomic Layer Deposition, Ghent, Belgium.

Research output: Contribution to conference › Poster › Scientific

TY - CONF

T1 - Feature-scale conformality of atomic layer deposition from continuum to free molecular flow: how Knudsen number influences thickness profile characteristics

AU - Velasco Calsina, Jorge

AU - Gonsalves, Christine

AU - Ersavas Isitman, Gizem

AU - Yim, Jihong

AU - Verkama, Emma

AU - Izbassarov, Daulet

AU - Vuorinen, Ville

AU - Puurunen, Riikka

N1 - Conference code: 22

PY - 2022

Y1 - 2022

M3 - Poster

T2 - International Conference on Atomic Layer Deposition

Y2 - 26 June 2022 through 29 June 2022

ER -