Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)

Research output: Contribution to journalArticleScientificpeer-review


Research units

  • Nagoya University


Original languageEnglish
Pages (from-to)S27-S37
Number of pages11
JournalJournal of Micromechanics and Microengineering
Issue number4
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

    Research areas

  • inhomogeneity, kinetic monte carlo, step bunching, surface morphology, wet etching, zigzag

ID: 3558990