@article{ca5cb2541aa2421793f9780dd5150bad,
title = "Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)",
keywords = "inhomogeneity, kinetic monte carlo, step bunching, surface morphology, wet etching, zigzag, inhomogeneity, kinetic monte carlo, step bunching, surface morphology, wet etching, zigzag, inhomogeneity, kinetic monte carlo, step bunching, surface morphology, wet etching, zigzag",
author = "M.A. Gos{\'a}lvez and Y. Xing and T. Hynninen and M. Uwaha and Foster, {A. S.} and Nieminen, {R. M.} and Kazuo Sato",
year = "2007",
doi = "10.1088/0960-1317/17/4/S02",
language = "English",
volume = "17",
pages = "S27--S37",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "Institute of Physics Publishing",
number = "4",
}