Faster simulations of step bunching during anisotropic etching: formation of zigzag structures on Si(110)

M.A. Gosálvez, Y. Xing, T. Hynninen, M. Uwaha, A. S. Foster, R. M. Nieminen, Kazuo Sato

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)S27-S37
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume17
Issue number4
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

Keywords

  • inhomogeneity
  • kinetic monte carlo
  • step bunching
  • surface morphology
  • wet etching
  • zigzag

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